JPS6213603B2 - - Google Patents

Info

Publication number
JPS6213603B2
JPS6213603B2 JP56200596A JP20059681A JPS6213603B2 JP S6213603 B2 JPS6213603 B2 JP S6213603B2 JP 56200596 A JP56200596 A JP 56200596A JP 20059681 A JP20059681 A JP 20059681A JP S6213603 B2 JPS6213603 B2 JP S6213603B2
Authority
JP
Japan
Prior art keywords
light
light receiving
scale
directions
receiving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56200596A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58100703A (ja
Inventor
Hideto Iwaoka
Koji Akyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YOKOKAWA DENKI KK
Original Assignee
YOKOKAWA DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YOKOKAWA DENKI KK filed Critical YOKOKAWA DENKI KK
Priority to JP56200596A priority Critical patent/JPS58100703A/ja
Publication of JPS58100703A publication Critical patent/JPS58100703A/ja
Publication of JPS6213603B2 publication Critical patent/JPS6213603B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP56200596A 1981-12-11 1981-12-11 光学式スケ−ル読取装置 Granted JPS58100703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56200596A JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56200596A JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS58100703A JPS58100703A (ja) 1983-06-15
JPS6213603B2 true JPS6213603B2 (en]) 1987-03-27

Family

ID=16426979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56200596A Granted JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS58100703A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433613U (en]) * 1987-08-20 1989-03-02
JP2562479B2 (ja) * 1988-04-25 1996-12-11 株式会社 ミツトヨ 反射式ｘｙエンコーダ
JPH01291101A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｎ次元エンコーダ
JPH01291194A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｘ−ｙテーブル
US7134343B2 (en) * 2003-07-25 2006-11-14 Kabushiki Kaisha Toshiba Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound
DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer

Also Published As

Publication number Publication date
JPS58100703A (ja) 1983-06-15

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